Targeted Research Division,
Transdisciplinary Fluid Integration
Research Center

Intelligent Nano-Process Laboratory



Professor
Seiji Samukawa


Associate Professor
Tomohiro Kubota


Assistant Professor
Takeru Okada


Assistant Professor
Weiguo Hu


     To fabricate next generation nano-scale devices, plasma, beam (ion and neutral beam), atom manipulation and bio-nano processes must be precisely controlled. This laboratory plans to study the interaction between reactive species (electrons, ions, atom, molecular, radical and photon) and material surfaces. Additionally, based on atom and molecular processes, future bio-nano processes have been also investigated. Our goal is “Intelligent Nano-Processes” by combination of digital processes (atomic layer processes) and simulations of surface chemical reactions.

 

Precise plasma processing

 

Environmentally harmonized plasma processes for future nano-devices

     Environmentally harmonized new gas chemistry for high-performance SiO2 etching is proposed.Our newly designed CF3I/C2F4 gases have a very low global warning potential and achieve a high-performance etching through the selective radical generation in the plasma.

     


Silicon dioxide etching using environmentally harmonized new gas chemistry

 

 

Fabrication of 3-dimesional nano- structure using beam technology


     To accomplish highly efficient and selective surface reactions in 3-D nano-structure processes (chemical vapor deposition, etching), a high-performance, multi-beam (positive ion, negative ion and neutral) generation system has been developed.



50nm Precise Etching Processes
using Neutral Beam



Ultrathin Oxynitride Film Formation


High-performance
On-wafer-Monitoring System


Bio-Nano Processes

      On-wafer monitoring and sensing systems are developed for precise control of plasma, beam and atom manipulation processes on the surfaces.

     New advanced nm patterning techniques for future generation devices are developed using a protein and DNA.

On-wafer monitoring system in plasma
processing
6nm metal electrode pattering using 2D protein
(including metal core in protein) crystal

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Trandisciplinary Fluid Integration Reseach Center

Intelligent Nano-Process Laboratory