{"id":1327,"date":"2022-10-03T14:04:43","date_gmt":"2022-10-03T05:04:43","guid":{"rendered":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/?page_id=1327"},"modified":"2026-04-01T10:20:04","modified_gmt":"2026-04-01T01:20:04","slug":"gnl","status":"publish","type":"page","link":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/research\/dv_ifs-gcore\/gnl\/","title":{"rendered":"Green Nanotechnology Laboratory"},"content":{"rendered":"<div class=\"research\">\r\n<div class=\"header\">\r\n<div class=\"wrapper\">\r\n<div class=\"clearfix\"><ul class=\"breadcrumb\">\n<li><a href=\"\/jpn\/\">TOP<\/a><\/li>\n<li><a href=\"https:\/\/www.ifs.tohoku.ac.jp\/eng\/research\/\">Research<\/a><\/li>\n<li><a href=\"https:\/\/www.ifs.tohoku.ac.jp\/eng\/research\/dv_ifs-gcore\/\">Global Collaborative Research and Education Center for Integrated Flow Science (IFS-GCORE)<\/a><\/li>\n<li>Green Nanotechnology Laboratory<li>\n<\/ul><\/div>\r\n<h2>Global Collaborative Research and Education Center for Integrated Flow Science (IFS-GCORE)<\/h2>\r\n<h3>Green Nanotechnology Laboratory<\/h3>\r\n<div class=\"clearfix\">\r\n<ul class=\"professor\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/professor\/kazuhikoendo.jpg\" \/>\r\n<p><span>Professor<\/span>Kazuhiko Endo<\/p>\r\n<\/li>\r\n<li><\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"clearfix\">\r\n<ul class=\"sdgs\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-07.jpg\" \/><\/li>\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-09.jpg\" \/><\/li>\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-17.jpg\" \/><\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"clearfix\">\r\n<div class=\"labo\"><a href=\"https:\/\/www.ifs.tohoku.ac.jp\/gnt\/endo\/\" target=\"_blnak\" rel=\"noopener\">Enter the Lab Page<\/a><\/div>\r\n<\/div>\r\n<div class=\"clearfix\">\r\n<div class=\"labo\"><\/div>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<div class=\"gray\">\r\n<div class=\"wrapper\">To fabricate next generation nano-scale devices, plasma, beam (ion and neutral beam), atom manipulation and bio-nano processes must be precisely controlled. This laboratory plans to study the interaction between reactive species (electrons, ions, atom, molecular, radical and photon) and material surfaces. Additionally, based on atom and molecular processes, future bio-nano processes have been also investigated. Our goal is \u201cIntelligent Nano-Processes\u201d by combination of digital processes (atomic layer processes) and simulations of surface chemical reactions.<\/div>\r\n<\/div>\r\n<div class=\"contents\">\r\n<div class=\"wrapper\">\r\n<h4>Building Integrated Platform of Si\/Ge Heterogeneous CMOS for 2 nm Generation<\/h4>\r\n<div>Si\/Ge heterogeneous Complementary-Field Effect Transistor (hCFET) was developed between Japan and Taiwan. To combine our defect-free neutral beam etching technique and the most-advanced semiconductor platform in Taiwan, we are aimed at the achievement of high integration and performance.<\/div>\r\n<div class=\"photo\">\r\n<div class=\"clearfix\">\r\n<ul class=\"single\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/division\/20_img\/20_001.jpg\" \/><\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<div class=\"clearfix\">\r\n<ul class=\"sdgs\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-09.jpg\" \/><\/li>\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-17.jpg\" \/><\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<div class=\"contents\">\r\n<div class=\"wrapper\">\r\n<h4>Nano device and System on Chip (SoC) Achievement<\/h4>\r\n<div>To achieve the hybrid structure of hetero material and device, Si (Ge) MOSFET driver of low power consumption for driving the high-power GaN HEMT device was fabricated. The structure use 3D bonding technique. Finally, our goal is to achieve the low-power 3D SoC structure.<\/div>\r\n<div class=\"photo\">\r\n<div class=\"clearfix\">\r\n<ul class=\"single\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/division\/20_img\/20_002.jpg\" \/><\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<div class=\"clearfix\">\r\n<ul class=\"sdgs\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-09.jpg\" \/><\/li>\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-17.jpg\" \/><\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<div class=\"contents\">\r\n<div class=\"wrapper\">\r\n<h4>High-mobility Semiconductor Device for Phonon Field Control by Defect-free Nano Periodic Structure<\/h4>\r\n<div>An innovative top-down method, a fusion of bio-template and damage-free neutral beam etching, is proposed by Prof. Seiji Samukawa to fabricate highly ordered and dense nanostructure array without defect. It has great potential for fabricating new structure for controlling the phonon field of transistor using nano periodic structure.<\/div>\r\n<div class=\"photo\">\r\n<div class=\"clearfix\">\r\n<ul class=\"single\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/division\/20_img\/20_003.jpg\" \/><\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<div class=\"clearfix\">\r\n<ul class=\"sdgs\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-07.jpg\" \/><\/li>\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-09.jpg\" \/><\/li>\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-17.jpg\" \/><\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<div class=\"contents\">\r\n<div class=\"wrapper\">\r\n<h4>Designable Quantum Dot Fabrication Technique by Bio-template Ultimate Technique<\/h4>\r\n<div>Quantum dot structure is fabricated by bio-template ultimate technique. Electron and photon are controlled by using sub-10 nm quantum structure. Moreover, we research the electron spin retention and spin transfer control for quantum computing.<\/div>\r\n<div class=\"photo\">\r\n<div class=\"clearfix\">\r\n<ul class=\"single\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/division\/20_img\/20_004.jpg\" \/><\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<div class=\"clearfix\">\r\n<ul class=\"sdgs\">\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-07.jpg\" \/><\/li>\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-09.jpg\" \/><\/li>\r\n<li><img decoding=\"async\" src=\"\/jpn\/wp-content\/themes\/ifs\/images\/research\/sdgs_icon_e\/sdgs-17.jpg\" \/><\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<div class=\"footer clearfix\">\r\n<div class=\"wrapper\">\r\n<div class=\"labo\"><a href=\"https:\/\/www.ifs.tohoku.ac.jp\/gnt\/endo\/\" target=\"_blnak\" rel=\"noopener\">Enter the Lab Page<\/a><\/div>\r\n<\/div>\r\n<\/div>\r\n<\/div>","protected":false},"excerpt":{"rendered":"Global Collaborative Research and Education Center for Integrated Flow Science (IFS-GCORE) Green Nanotechnology Laboratory ProfessorKazuhiko Endo Enter the Lab Page To fabricate next generation nano-scale devices, plasma, beam (ion and neutral beam), atom manipulation and bio-nano processes must be precisely controlled. This laboratory plans to study the interaction between reactive species (electrons, ions, atom, molecular, [&hellip;]","protected":false},"author":1,"featured_media":0,"parent":1315,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-1327","page","type-page","status-publish","hentry"],"acf":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/wp-json\/wp\/v2\/pages\/1327","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/wp-json\/wp\/v2\/comments?post=1327"}],"version-history":[{"count":9,"href":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/wp-json\/wp\/v2\/pages\/1327\/revisions"}],"predecessor-version":[{"id":2285,"href":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/wp-json\/wp\/v2\/pages\/1327\/revisions\/2285"}],"up":[{"embeddable":true,"href":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/wp-json\/wp\/v2\/pages\/1315"}],"wp:attachment":[{"href":"https:\/\/www.ifs.tohoku.ac.jp\/eng\/wp-json\/wp\/v2\/media?parent=1327"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}