SAMUKAWA Lab Green Nanotechnology Lab.,Innovative Energy Research Center, Institute of Fluid Science, Tohoku University(Previous: Intelligent Nano-Process Lab.)

National Institute of Advanced Industrial Science and Technology (AIST) Nanoelectronics Research Institute/Samukawa Lab satellite lab is launched!

Professor Samukawa received cross-appointment to AIST as fellow from April 2015. Installation and launch of the neutral beam etching system relocated to the Nanoelectronics Research Institute in the AIST Tsukuba Center was completed on February 26, 2016. This completed the satellite lab. Substantial R&D of nanodevices at AIST can now begin. At AIST, Professor Samukawa is expanding his research to cutting-edge devices such as advanced transistors and nanoelectronic devices, and he is moving forward with their transfer to industry. This is the second satellite Samukawa Lab after the first at National Chiao Tung University in Taiwan.

Reference: "Research of New Materials Integrated Devices Using Neutral Beam Etching" (PDF) (in Japanese)