Jul 16, 2021 【Naoya Uene, Takashi Tokumasu】
Naoya Uene gave an invited talk on “Numerical Simulation Study for Optimization of Material/Process and Composition/Structure in CVD/ALD thin film growth by Reactive Molecular Dynamics Method and Density Functional Theory”.
The Japan Society of Applied Physics Silicon Technology Division Research Meeting 229
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Jul 20, 2021|Conference