June 26-29, 2022
Naoya Uene gave a presentation on "Experimental and ReaxFF MD studies for Boron Nitride ALD growth from BCl3 and NH3 precursors".
school
July 6, 2022｜Conference
ALD/ALE2022
June 26-29, 2022
Naoya Uene gave a presentation on "Experimental and ReaxFF MD studies for Boron Nitride ALD growth from BCl3 and NH3 precursors".