About us
Events
Professor Samukawa delivers invited lecture at IEEE Silicon Nano-electronics Workshop (June 13, 2016)
Professor Samukawa was invited to give a presentation at the IEEE Silicon Nano-electronics Workshop in Honolulu, Hawaii, a satellite workshop of the VLSI Technology Symposium.
The presentation dealt with processing, surface modification, and deposition techniques for 3D transistors, and emphasized how neutral beam technology can markedly improve all processing pertaining to semiconductor processes.
Judging from the many questions and reactions, the content of Professor Samukawa's talk really hit the mark. Although Professor Samukawa's stay from June 11 to 13 was short, his presentation provoked serious discussion.
