About us
Events
Prof. Samukawa invited to Shanghai/AMEC, Lectures on plasma etching (July 18, 2017)
From July 17-18, Prof. Samukawa was invited to visit Advanced Micro-Fabrication Equipment, Inc. (AMEC), which was founded in Shanghai by engineers spun out from Lam Research, AMT, or TEL. He was invited to scorching (over 37C) Shanghai Pudong New District to give a lecture on the plasma etching process, especially plasma damage, as part of training for process engineers.
The planned content was 90 minutes including 1) Introduction, 2) Plasma etching basics, 3) Plasma damage and its measurement, and 4) Plasma damage resolution methods, but there were so many questions it became a 150-minute lecture. Prof. Samukawa was excited about the lively discussion.
China is expected to lead the semiconductor industry in the near future. Prof. Samukawa keenly felt the enthusiasm about this from the engineers gathered from around the world.
