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Professor Samukawa gives invited lecture at CAMP 2017 (Aug. 14-16, 2017)
Dr. Samukawa was invited to the 21st International Symposium on Chemical-Mechanical Planarization (CAMP 2017) held at Lake Placid in the United States from Aug. 14-16, and gave an invited lecture on neutral particle beams.
CMP is now required to be flat at the atomic layer level, and defect control through polishing has become a major issue. For this reason, flattening and defect control through a neutral particle beam has attracted attention. Flattening and defect control may gain much attention as one application of neutral particle beam technology in the future.
Lake Placid also hosted the Winter Olympics twice, in 1932 and 1980, and is one of the United States' major villa areas. With a cool, pleasant climate even in the summer, Dr. Samukawa, who cut into his summer holiday to participate, said that he had a relaxing time in the majesty of nature and came back refreshed.
