研究室紹介
行事
寒川先生、台灣儀器科技研究中心 (国立研究所)主催の原子層加工・堆積技術ワークショップで基調講演！
國立陽明交通大学・寒川講座教授は9月4日に開催される2023年ALD Equipment Development Workshop「2023 半導體設備原子級薄膜製程技術交流會」で基調講演を行うことになりました。
これは2/3nm世代で必要不可欠になってきた真の原子層プロセスに関する装置開発関連のワークショップで、中性粒子ビーム装置がそのために注目を集めていることを示している。装置開発する国立研究所なので中性粒子ビームの開発が日台企業を巻き込む国家プロジェクトの可能性を示している。
https://www.tiri.narl.org.tw/Bulletin/NEWINFO_Details/60569
[台灣儀器科技研究中心Taiwan Instrument Research Institute:TIRI]
Taiwan’s Leading R&D Hub in Critical Instrumentation.
Since its establishment in 1974, Taiwan Instrument Research Institute (TIRI) has been known as a pioneer in optics and vacuum technology. In line with government policy priorities, TIRI executes to foster research, development and applications of high-end dominant instruments in Taiwan. Meanwhile, in view of the fact that scientific research and innovation rely significantly on instrumentation, TIRI has been devoted to developing in the areas of “cutting-edge optics”, “advanced vacuum technology” and “intelligent biotechnology”. TIRI is the only research organization in Taiwan that can provide customized services in specialized instruments for customers across domains including science, healthcare, engineering, agriculture and art.
As Taiwan's leading R&D hub in critical instruments, TIRI targets to build up service platforms for fundamental instrumentation, to refine our core technologies, and to become the key partner for academic research in response to technology development trends. TIRI continues to focus on assisting the academia and industry in developing customized and special instruments needed for state-of-the-art research. We also enthusiastically put effort in developing “No.1 in Taiwan” and “world-leading” advanced dominant instruments, aiming to enhance the independent R&D capabilities and applications of critical instruments for the next generation, to effectively use national technology resources, and to greatly benefit the society.
