寒川研究室 東北大学流体科学研究所・未到エネルギー研究センター　グリーンナノテクノロジー研究分野　寒川研究室　(旧: 知的ナノプロセス研究分野)

Conductive DLC film synthesis by NBECVD technique and its application as sensor of Bio-LSI

We use neutral beam enhanced chemical vapor deposition (NBECVD) technique for diamond like carbon film deposition in low temperature, which is expected used in bio-sensor. To enhance the film electrical conductivity, nitrogen doping is selected. As a result, the conductivity of DLC: N film increases significantly. We tested the film electrochemical properties by cyclic voltametry method. This film expresses very good electrochemical activity and also flat potential window as graphite. Finally, the film was applied to the Bio-LSI chip. The LSI with carbon coated electrodes can work well and with the better biocompatibility from carbon, dopamine diffusion real imaging have been done successfully.